It is known that high intense pulsed ion beams ( hipib ) have a high viability to be used as an efficient energetic source for rapid film deposition and direct surface modification . up to now , however , there is still lack of a systematic work to reveal the influence of hipib on the film deposition and material modification although there are lots of papers have been published in the field . in the present work , these two practical applications of hipib were all investigated in detail 根据强流脉冲离子束( highintensepulseionbeam ? hipib )技术具有快速沉积薄膜和材料表面辐照处理改性的特点,而目前对其薄膜沉积和材料辐照处理缺乏系统研究,本论文的工作分为两部分,其一是类金刚石薄膜( diamondlikecarbon ? dlc )沉积,其二是高速钢直接辐照处理表面改性。